A grounded coplanar waveguide with a metallized silicon cavity fabricated by front-surface-only processes

CAD models for shielded multilayered CPW

Spartak Gevorgian, L.J.P. Linnér, E. Kollberg · IEEE Transactions on Microwave Theory and Techniques · 1995 · 154 citations

Engineering, Electrical Engineering, Circuit Theory +16

Si-micromachined coplanar waveguides for use in high-frequency circuits

K.J. Herrick, Thomas Schwarz, L.P.B. Katehi · IEEE Transactions on Microwave Theory and Techniques · 1998 · 140 citations

Engineering, Electrical Engineering, Microelectronics +16

Low-loss CPW on low-resistivity Si substrates with a micromachined polyimide interface layer for RFIC interconnects

George E. Ponchak, A. Margomenos, L.P.B. Katehi · IEEE Transactions on Microwave Theory and Techniques · 2001 · 100 citations

Engineering, Electrical Engineering, Materials Science +16

Micromachined microwave transmission lines in CMOS technology

V. Milanović, Michael Gaitan, E.D. Bowen et al. · IEEE Transactions on Microwave Theory and Techniques · 1997 · 90 citations

Engineering, Electrical Engineering, Microelectronics +16

A new micromachined overlay CPW structure with low attenuation over wide impedance ranges and its application to low-pass filters

Hong-Teuk Kim, Sang-Hwa Jung, Jae-Hyoung Park et al. · IEEE Transactions on Microwave Theory and Techniques · 2001 · 38 citations

Engineering, Electrical Engineering, Microelectronics +15