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Hydrogen sensitivity of palladium–thin-oxide–silicon Schottky barriers
124
Citations
5
References
1976
Year
Electrical EngineeringEngineeringHydrogen PressurePhysicsHydrogen SensitivityNanoelectronicsCurrent TransportHydrogen TransitionApplied PhysicsSchottky BarriersHydrogenCharge Carrier TransportMicroelectronicsCharge TransportSilicon On InsulatorSemiconductor Device
It is shown that current transport through Schottky barriers formed by Pd on n-type silicon with a thin thermally grown oxide is sensitive to hydrogen in the ambient. It is shown that a transition from minority- to majority-carrier dominated current occurs with increasing hydrogen pressure.
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