Mass sensitivity of Love-mode acoustic sensors incorporating silicon dioxide and silicon-oxy-fluoride guiding layers - Concepedia

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Mass sensitivity of Love-mode acoustic sensors incorporating silicon dioxide and silicon-oxy-fluoride guiding layers

25

Citations

24

References

2001

Year

Geoffrey Harding

Sensors and Actuators A Physical

VibrationsEngineeringMicrofabricationAcoustic MetamaterialMicromachined Ultrasonic TransducerApplied PhysicsNoiseAcoustic TweezerMass SensitivityAcoustic SensorUltrasoundLove-mode Acoustic SensorsSensor TechnologySilicon Dioxide

References

	Year	Citations

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