Concepedia

Titanium nitride coating on implanted layer using titanium plasma based ion implantation

Mizuki Sano, Ken Yukimura, T. Maruyama, Shunji Kurooka, Yoshikazu Suzuki, Akiyoshi Chayahara, A. Kinomura, Y. Horino

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 24 citations · 5 references

DOI

Concepts

References

5

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

, , +16

Improved time-of-flight ion charge state diagnostic

I.G. Brown, James E. Galvin, R.A. MacGill et al. · Review of Scientific Instruments · 1987 · 138 citations

, , +7

Development of a plasma immersion ion implanter for the surface treatment of metal components

George Collins, R. Hutchings, K. T. Short et al. · Surface and Coatings Technology · 1996 · 76 citations

, , +14

Radio-frequency plasma nitriding and nitrogen plasma immersion ion implantation of Ti-6A1-4V alloy

S.Y. Wang, Paul K. Chu, B.Y. Tang et al. · Surface and Coatings Technology · 1997 · 49 citations

, , +12

PIII-assisted thin film deposition

S. Schoser, J.-L. Forget, K. Kohlhof · Surface and Coatings Technology · 1997 · 31 citations

, , +8