Japanese Journal of Applied Physics · 2008 · 10 citations · 11 references
EngineeringMechanical EngineeringAcousticsInstrumentationSensorsAcoustic Sensing SystemsAcoustic SensorsGas SensorsTemperature MeasurementTemperature SensorsTransducer TechnologyCompensation TemperatureHarmonicsSurface Acoustic Wave Gas SensorsSurface Acoustic Wave SensorsTemperature CompensationTemperature Compensation MechanismsTemperature DriftTemperature Sensor Drift
A newly designed 1-mm diameter harmonic ball surface acoustic wave (SAW) gas sensor has a double-electrode interdigital transducer (IDT) for driving multiple frequencies. The fundamental frequency is 80 MHz. The difference in delay time between a fundamental frequency component and a high harmonics was used to compensate temperature drift. A temperature coefficient of about 0.1 ppm/°C was obtained after compensation.
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