Development of Substrate Structures and Processes for Practical Applications of Various Surface Acoustic Wave Devices

Abstract

The author and coengineers have developed, put to practical use, mass-produced, and commercialized various surface acoustic wave (SAW) devices. Their success depended largely on the development of SAW substrate materials, SAW device structures, and the processes of producing with the cooperation of many engineers. The author reports the development and practical applications of several SAW devices: (1) ZnO/glass structure SAW filters for video intermediate frequency (VIF) for televisions (TVs) or video cassette recorders (VCRs), (2) small resonators and filters using Bleustein-Gulyaev-Shimizu (BGS) wave's edge reflection on ceramic substrates, (3) small filters using shear horizontal leaky SAWs on heavy-density-metal electrode/quartz structures, (4) ZnO/quartz structure SAW filters, and (5) SAW duplexers with excellent temperature characteristics for personal communication services (PCSs) in the US.