Journal of Electronic Materials · 2003 · 23 citations · 2 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film DiffusionThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsDiffusion BarriersIndium Tin Oxide Thin FilmsLiquid Crystal DisplaysPolycrystalline Silicon Thin-film TransistorsThin-film Semiconductors
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Low temperature polycrystalline silicon thin film transistors
Jin Jang, Jai Il Ryu, Soo Young Yoon et al. · Vacuum · 1998 · 17 citations