Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 11 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMaterials CharacterizationMetrologySurface ScienceDefect CharacterizationOptical MetrologyPhysical OpticsSurface MetrologySurface RoughnessSurface TopographyLight ScatteringRoughnessRoughness MeasurementScatterometrySurface Defect CharacterizationSurface DefectsSurface Defects CharacterizationSurface Roughness Measurement
The microtopography of a certain surface is a complicated structure varying across the complete surface. Every surface has different elements of microstructure. In this paper, we consider roughness as a fine structure and defects as large structure elements. Roughness measurement on BK7-glass and CaF<SUB>2</SUB> samples is considered using different techniques. The comparison includes the automatic scatterometer STREUIX 2 and a TIS-measurement system, the ZYGO microprofilometer MAXIM (DOT) 3D, and the NANO SCOPE III of Digital Instruments. For the investigation of scattering characteristics of different surface defects, a special measuring device was developed. The scattered light distribution of different defects and contaminations measured with this set-up is discussed.