Concepedia
Journal of Materials Processing Technology · 1996 · 39 citations · 1 references
Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsStructural MaterialsFracture ToughnessMachiningWork HardeningBall MillingBrittle FailureGrindingGrinding BehaviorMilling Processes
1
Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing
H. Ohmori, Tomoyuki Nakagawa · CIRP Annals · 1990 · 331 citations
Engineering, Manufacturing Engineering, Materials Engineering +16