Publication | Closed Access
Leakage currents and conduction mechanisms of Ta2O5 layers on Si obtained by RF sputtering
25
Citations
8
References
2000
Year
Electrical EngineeringEngineeringPhysicsNanoelectronicsOxide ElectronicsApplied PhysicsConduction MechanismsTa2o5 LayersSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsLeakage CurrentsSemiconductor Device
| Year | Citations | |
|---|---|---|
Page 1
Page 1