A Compact and Low-Loss MMI Coupler Fabricated With CMOS Technology

Abstract

We present the design, fabrication, and measurement of a compact and low-loss multimode interference (MMI) coupler based on the silicon nanowire waveguide. The device is carefully designed to achieve both a good performance and a compact size by using the mode matching method. The device is fabricated on silicon-on-insulator (SOI) with 0.13-μm CMOS technology. By measuring the MMI coupler with a cascaded configuration, a very low excess loss of 0.06 dB at the wavelength of 1550 nm is obtained. The device can also work well for a wide wavelength band. The present MMI coupler is very compact with a footprint of ~ 3.6 × 11.5 μm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> for the multimode region.