The deposition of aluminium oxide coatings by reactive unbalanced magnetron sputtering

Pulsed magnetron sputter technology

S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 334 citations

Magnetism, Engineering, Applied Physics +4

Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering

Dermot Monaghan, D.G. Teer, Paul Logan et al. · Surface and Coatings Technology · 1993 · 181 citations

Materials Science, Materials Engineering, Diamond-like Carbon +10

Reactive direct current magnetron sputtering of aluminum oxide coatings

W.D. Sproul, Michael E. Graham, Ming‐Show Wong et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 101 citations

Materials Science, Materials Engineering, Thermal Spray Coating +12

Influence of the plasma on substrate heating during low-frequency reactive sputtering of AIN

David A. Glocker · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 100 citations

Materials Engineering, Electrical Engineering, Engineering +14

Deposition of graded alloy nitride films by closed field unbalanced magnetron sputtering

Dermot Monaghan, D.G. Teer, K.C. Laing et al. · Surface and Coatings Technology · 1993 · 85 citations

Materials Engineering, Magnetism, Materials Science +11