Diamond and Related Materials · 2005 · 30 citations · 3 references
Natural SciencesMaterials EngineeringMaterials SciencePlasma PhysicsSurface EngineeringThin FilmsChemical Vapor DepositionCoating TechnologyCoatingsPlasma-surface InteractionsPlasma-wall InteractionsThin-film DepositionCvd CoatingsPlasma DepositionPlasma-assisted Chemical Vapor DepositionPlasma-assisted CoatingPlasma-enhanced Deposition
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