Journal of Electroceramics · 2009 · 19 citations · 16 references
Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsThin FilmsThin Film Mechanical PropertiesThin-film MaterialsFilm Growth MechanismsFilm MicrostructureFilm Strain
16
Mechanical properties of thin films
William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations
Natural Sciences, Materials Engineering, Materials Science +15
Materials issues in microelectromechanical systems (MEMS)
S.M. Spearing · Acta Materialia · 2000 · 652 citations
San‐Yuan Chen, I‐Wei Chen · Journal of the American Ceramic Society · 1994 · 228 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +14