Fabrication and characterization of a thermal flow sensor based on porous silicon technology

Abstract

The fabrication and characterization of a thermal flow sensor based on porous silicon technology is reported. The sensor, developed for gas metering applications, was designed in order to maintain compatibility with a gaseous environment and to exhibit a low power consumption. The different steps of the fabrication process are described with emphasis on the porous silicon technology and packaging techniques. Thermal characterizations of the sensors and measurements in continuous flows were performed.