Concepedia

A New Grinding Method for Ceramics Using a Biaxially Vibrated Nonrotational Ultrasonic Tool

Kiyoshi Suzuki, H. Tochinai, Takeshi Uematsu, Shoji Mishiro, Takeo Nakagawa

CIRP Annals · 1993 · 24 citations · 3 references

DOI

Concepts

References

3

Mirror Surface Grinding of Silicon Wafers with Electrolytic In-Process Dressing

H. Ohmori, Tomoyuki Nakagawa · CIRP Annals · 1990 · 331 citations

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Highly Efficient Grinding of Ceramics and Hard Metals on Grinding Center

Takeo Nakagawa, Kiyoshi Suzuki, Takeshi Uematsu · CIRP Annals · 1986 · 34 citations

, , +7

Development of a New Mechanochemical Polishing Method with a Polishing Film for Ceramic Round Bars

Kiyoshi Suzuki, Taro Uematsu, Hirotsugu Ohashi et al. · CIRP Annals · 1992 · 16 citations

, , +14