Concepedia

The growth kinetics and properties of hard and insulating carbonaceous films grown in an r.f. discharge

S.M. Ojha, H. Norström, D. McCulluch

Thin Solid Films · 1979 · 49 citations · 11 references

DOI

Concepts

References

11

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

, , +1

Ion-beam-deposited polycrystalline diamondlike films

E. G. Spencer, P. H. Schmidt, DC Joy et al. · Applied Physics Letters · 1976 · 312 citations

, , +13

Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasma

L. Holland, S.M. Ojha · Thin Solid Films · 1976 · 207 citations

, , +11

The electrical and optical properties of amorphous carbon prepared by the glow discharge technique

David Anderson · Philosophical magazine · 1977 · 178 citations

, , +17

The growth of carbon films with random atomic structure from ion impact damage in a hydrocarbon plasma

L. Holland, S.M. Ojha · Thin Solid Films · 1979 · 170 citations

, , +16