Publication | Closed Access
Heating and material removal process in hybrid laser-waterjet ablation of silicon substrates
79
Citations
42
References
2014
Year
Materials ScienceAdvanced Laser ProcessingEngineeringMicrofabricationApplied PhysicsMaterial Removal ProcessLaser AblationLaser MaterialSilicon SubstratesLaser Processing TechnologyLaser-assisted DepositionHeat TransferThermal Engineering3D PrintingHybrid Laser-waterjet Ablation
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