Publication | Closed Access
Large area photochemical dry etching of polyimide with excimer UV lamps
44
Citations
15
References
1993
Year
Materials ScienceChemical EngineeringEngineeringBeam LithographyPhotochemistryUv-vis SpectroscopyPhotodegradationPolymer ScienceExcimer Uv LampsPhotopolymer NetworkChemistryPlasma EtchingOptoelectronicsPolymer Chemistry
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