Publication | Closed Access
Anisotropic vacancy kinetics and single-domain stabilization on Si(100)-2×1
96
Citations
17
References
1992
Year
Electrical EngineeringPreferential AnnihilationEngineeringIon ImplantationPhysicsEpitaxial GrowthSurface ScienceApplied PhysicsCondensed Matter PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsAnisotropic Vacancy KineticsDimer Rows
Preferential annihilation of mobile surface vacancies at the ends, rather than the sides, of dimer rows leads to a new, nonequilibrium, single-domain phase of Si(100) that is not accessible by epitaxial growth, but is stable at moderate temperatures (T\ensuremath{\sim}450 \ifmmode^\circ\else\textdegree\fi{}C). These results emerge from a tunneling-microscope study of layer-by-layer removal of Si from Si(100) under 225-eV Xe-ion bombardment.
| Year | Citations | |
|---|---|---|
Page 1
Page 1