Publication | Closed Access
Analytical and simulation studies for diode and triode ion beam extraction systems
13
Citations
5
References
2012
Year
Electrical EngineeringIon ImplantationEngineeringSimulation StudiesPhysicsMicroscopySimion 3DSpectroscopyExtraction SystemsApplied PhysicsIon Beam DynamicsNatural SciencesIon BeamComputational ElectromagneticsInstrumentationIon EmissionMicroelectronicsBeam Transport System
This work is concerned with ion beam dynamics and compares the emittance to aberration ratios of two-and three-electrode extraction systems. The study is conducted with the aid of Version 7 of SIMION 3D ray-tracing software. The beam dependence on various parameters of the extraction systems is studied and the numerical results lead to qualitative conclusions.
| Year | Citations | |
|---|---|---|
Page 1
Page 1