Ceramics International · 2004 · 15 citations · 17 references
Materials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionPlasma ProcessingThin Film ProcessingNanostructured Thin Films
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Chemical vapour deposition of coatings
Kwang‐Leong Choy · Progress in Materials Science · 2003 · 1.6K citations