Sensors and Actuators B Chemical · 2011 · 48 citations · 50 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationSurface ScienceCoatingsMems CharacterizationMicrofabrication ProcessesPolymer Thin FilmsSurface CoatingsSurface ModificationCoating MicrostructureMicroscale FabricationPolydimethylsiloxane Device FabricationPolymers In Mems FabricationSubstrate Materials
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