Low leakage of In0.83Ga0.17As photodiode with Al2O3/SiNx stacks

Jing Yang, Ming Shi, Xiumei Shao, Tao Li, Xue Li, Naiyun Tang, Haimei Gong, Ran Liu, Hengjing Tang, Zhi‐Jun Qiu

Infrared Physics & Technology · 2015 · 15 citations · 16 references

Concepts

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