Backscattering limitations to spatial resolution in the Auger microprobe

Estimates of the Efficiencies of Production and Detection of Electron-Excited Auger Emission

H. E. Bishop, J C Rivière · Journal of Applied Physics · 1969 · 214 citations

Engineering, Atomic Emission Spectroscopy, Electron Optic +17

Escape length of Auger electrons

M. L. Tarng, G. K. Wehner · Journal of Applied Physics · 1973 · 127 citations

Electrical Engineering, Engineering, Electron-beam Lithography +14

The estimation of backscattering effects in electron-induced Auger spectra

T E Gallon · Journal of Physics D Applied Physics · 1972 · 77 citations

Electrical Engineering, Engineering, Physics +15

The effect of backscattered electrons on the resolution of scanning Auger microscopy

J. A. Venables · Surface Science · 1978 · 37 citations

Materials Science, Backscattered Electrons, Engineering +9

Edge effect in high-resolution scanning Auger-electron microscopy

Ryuichi Shimizu, T. E. Everhart, Nick MacDonald et al. · Applied Physics Letters · 1978 · 33 citations

Materials Science, Engineering, Electron Microscopy +15