Concepedia

Publication | Closed Access

Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation

DOI

43

Citations

24

References

2011

Year

S. Azimi, Mark B. H. Breese, Zhiya Dang, Yusheng Yan, Y. S. Ow, Andrew A. Bettiol
Journal of Micromechanics and Microengineering

Abstract

10.1088/0960-1317/22/1/015015

References

YearCitations

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