Applied Surface Science · 2000 · 11 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceSpectroscopySurface ScienceThin FilmsChemical Vapor DepositionLaser SpectroscopyOptical SpectroscopyPhysical Vapor DepositionRaman SpectroscopySurface PhysicsFilm Growth MechanismsIn Situ Process MonitoringIn-situ MonitoringOptical Monitoring Of Film GrowthOxide Growth KineticsThin Film Growth MonitoringThin-film Growth KineticsThin-film Growth Mechanisms
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