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Determination of the density of Si-metal interface states and excess capacitance caused by them

Materials ScienceElectrical EngineeringExcess CapacitanceEngineeringInterface StructureNanoelectronicsSurface ScienceApplied PhysicsSemiconductor MaterialSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsSi-metal Interface StatesInterface Property