Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 17 citations · 7 references
Ion ImplantationPhysicsApplied PhysicsSilicon CrystalSemiconductor Device FabricationSilicon On InsulatorSemiconductor Device
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Observation of Channeling Radiation from Relativistic Electrons
R.L. Swent, R. H. Pantell, M. J. Alguard et al. · Physical Review Letters · 1979 · 131 citations
Axial channeling radiation from MeV electrons
J. U. Andersen, E. Bonderup, B.B. Marsh et al. · Nuclear Instruments and Methods in Physics Research · 1982 · 107 citations