Room-temperature fabrication of ultra-thin ZrO dielectric for high-performance InTiZnO thin-film transistors

A. Liu, G.X. Liu, Fukai Shan, Huihui Zhu, Song Xu, J.Q. Liu, Byoungchul Shin, W.J. Lee

Current Applied Physics · 2013 · 32 citations · 24 references

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