Publication | Closed Access
Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films
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Citations
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References
1990
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorChemical Vapor DepositionThin Film ProcessingThermophysical Properties
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