Concepedia

Thermophysical properties of low-residual stress, Silicon-rich, LPCVD silicon nitride films

Carlos H. Mastrangelo, Yu‐Chong Tai, R.S. Muller

Sensors and Actuators A Physical · 1990 · 138 citations · 4 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceMaterials ThermodynamicsSemiconductor MaterialsThin FilmsResidual StressSemiconductor PhysicsSemiconductor Thin FilmsSilicon MaterialsThermal Properties Of MaterialsThin Film Thermal PropertiesNitride Thin FilmsNitrides Thin FilmsResidual Stress EffectsResidual Stress In Thin FilmsSilicon NitrideThermophysical PropertiesThermophysical Property Measurement

References

4

A multisensor employing an ultrasonic Lamb-wave oscillator

S.W. Wenzel, R.M. White · IEEE Transactions on Electron Devices · 1988 · 254 citations

Engineering, Biomedical Engineering, Biosensors +16

Silicon nitride single-layer x-ray mask

Misao Sekimoto, Hideo Yoshihara, Takashi Ohkubo · Journal of Vacuum Science and Technology · 1982 · 186 citations

Natural Sciences, Materials Engineering, Materials Science +17

Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films

C. H. Mastrangelo, R.S. Muller · Journal of Applied Physics · 1988 · 137 citations

Engineering, Materials Engineering, Materials Science +17

Electrical trimming of heavily doped polycrystalline silicon resistors

Yoshiyuki Amemiya, T. Ono, K. Kato · IEEE Transactions on Electron Devices · 1979 · 50 citations

Engineering, Electrical Engineering, Materials Science +15