Generation of Thin Surface Plasma Layers for Atmospheric‐Pressure Surface Treatments

Abstract

Abstract Thin layers of atmospheric‐pressure non‐equilibrium plasma can be generated by pulse surface corona discharges and surface barrier discharges developing on the treated surfaces or brought into a close contact with the treated surfaces. Plasma sources based on these discharge types have the potential of meeting the basic on‐line production requirements in the industry and can be useful for a wide range of surface treatments and deposition processes including continuous treatment of textiles. Comparing with atmospheric pressure glow discharge sources, the potential advantages of these plasma sources include their simplicity, robustness, and capability to process in a wide range of working gases. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)