Journal of Analytical Atomic Spectrometry · 1999 · 46 citations · 8 references
Natural SciencesChemistryPhysicsAnalytical ChemistrySpectroscopySurface ScienceAtomic Emission SpectroscopyEmission SpectroscopyAnalytical Detection LimitsGlow Discharge Emission SpectroscopyGlow Discharge SpectrometryGlow DischargesSputteringSputtering TechniquesSurface LayersTemporal Response
A high voltage, microsecond regime pulse dc glow discharge was applied to a standard Grimm source on a modified LECO SA-2000 direct reader spectrometer and to a duplicate Grimm source coupled to a scanning monochromator. The effects of experimental conditions, including pulse voltage, pulse frequency, pulse width and Ar pressure, on Cu atomic and ionic emission intensities were examined and compared with continuous discharge results. The pulsed Grimm source has a higher sputtering rate, greater signal intensity and lower detection limits. The pulsed signal for atomic lines shows a different temporal response from ionic lines. Pulsed Grimm GD-AES also offers control features advantageous in the measurement of thin surface layers.
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Temporal Considerations With a Microsecond Pulsed Glow Discharge
W. W. Harrison, Wei Hang, Xiaomei Yan et al. · Journal of Analytical Atomic Spectrometry · 1997 · 41 citations
Natural Sciences, Chemistry, Physics +17