Investigations on PECVD boron carbonitride layers by means of ERDA, XPS and nano-indentation measurements

Thomas Thamm, D. Wett, Erik Strub, J. Röhrich, Rüdiger Szargan, Günter Marx, Werner A. Goedel

Microchimica Acta · 2006 · 14 citations · 13 references

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