Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 35 citations · 39 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsNanomaterialsNanotechnologyCarbon NanomaterialsCarbon NanotubesElectrical CharacterizationNanoelectronicsNanotubesCarbon Nanotube CharacterizationCarbon Nanotube Field EmissionField EmissionNanopositioningNanopositioning Systems
This article demonstrates the characterization of field emission from individual carbon nanotubes (CNTs) attached to a tungsten tip, when the separation distance s between the anode and tip of the CNT (cathode) is less than 15μm. The separation distance is adjusted with a nanopositioning stage after establishing a datum by detecting the anode surface with the CNT tip. Our separation distance s differs by the height h of the CNT from the distance d that is often measured between the planar anode and the planar substrate of an emitting cathode. Consequently, the electric field at the tip of the CNT is modeled by F=λV∕s, where λ is our field amplification factor, rather than by F=γV∕d, where γ is the more conventional field enhancement factor. Twenty-four sets of current-voltage I(V) data were measured from an individual multiwall CNT at separation distances s between 1.4 and 13.5μm. A nonlinear curve-fitting algorithm extracted Fowler-Nordheim (FN) parameters from each set of I(V) data, rather than conventional extraction from the FN plots. The turn-on voltage Vto (to emit 1nA) as a function of the separation distance followed an empirical power relation Vto=asb, and the field amplification factor λ empirically followed the relation λ=λ∞s∕(s+h)+1. This experimental characterization is an improvement over other techniques since the gap is controlled more precisely over a larger range, the electric field at the CNT tip is not disturbed by other CNTs, and the anode is flat to within a few nanometers.
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