Water-assisted drilling of microfluidic chambers inside silica glass with femtosecond laser pulses

Femtosecond laser-assisted three-dimensional microfabrication in silica

A. Marcinkevičius, Saulius Juodkazis, Mitsuru Watanabe et al. · Optics Letters · 2001 · 723 citations · Full text

Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses

Yan Li, Kazuyoshi Itoh, Wataru Watanabe et al. · Optics Letters · 2001 · 249 citations

Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing

Ya Cheng, Koji Sugioka, Katsumi Midorikawa · Optics Letters · 2004 · 225 citations

Photonics, Advanced Laser Processing, Engineering +15

Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass

David Hwang, Tae-Youl Choi, Costas P. Grigoropoulos · Applied Physics A · 2004 · 215 citations

Advanced Laser Processing, Engineering, Laser Micro-processing +10

Femtosecond laser-drilled capillary integrated into a microfluidic device

Tyson N. Kim, Kyle Campbell, Alex Groisman et al. · Applied Physics Letters · 2005 · 130 citations

Microfluidic Device, Engineering, Micromachines +15