Concepedia

Publication | Closed Access

Modeling of electronic stopping and damage accumulation during arsenic implantation in silicon

DOI

10

Citations

15

References

1995

Year

A. Simionescu, S. Herzog, G. Hobler, R. Schork, J. Lorenz, C. Tian, Gerhard Stingeder
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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