Long-Pulse-Discharge XeF and KrF Lasers Pumped by a Generator with Inductive Energy Storage

Abstract

The development of long-pulse-discharge XeF and KrF excimer lasers pumped by a generator with inductive energy storage and a semiconductor opening switch is reported. It is shown that the use of the inductive storage element enables sufficiently improved discharge stability and expands the laser pulse duration. The laser output pulses with a full-width at half maximum (FWHM) duration of 60 ns were obtained both in Ne–Xe–NF3 and Ne–Kr–F2 gas mixtures, corresponding to the laser specific output of 2.5 J/l and the intrinsic efficiency of over 1%.