Concepedia

Publication | Open Access

Flying phase mask for the printing of long submicron-period stitchingless gratings

DOIFull Paper Access

12

Citations

2

References

2006

Year

Émilie Gamet, Yves Jourlin, Serge Pélissier, Rui Min, Stéphanie Reynaud, C. Veillas, J.‐C. POMMIER
Microelectronic Engineering

References

YearCitations

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