Novel low-k polycyanurates for integrated circuit (IC) metallization

Synthesis and characterization of novel low‐dielectric cyanate esters

Jeng‐Yueh Shieh, Shih‐Peng Yang, Mei‐Feng Wu et al. · Journal of Polymer Science Part A Polymer Chemistry · 2004 · 45 citations

Natural Sciences, Chemistry, Materials Science +17

Effect of <i>ortho</i>‐methylation on a bis(4‐cyanatocumyl)benezene low‐dielectric resin

Eva M. Maya, Arthur W. Snow, Leonard J. Buckley · Journal of Polymer Science Part A Polymer Chemistry · 2002 · 15 citations

Natural Sciences, Chemistry, Materials Science +17

Improvement of mechanical integrity of ultra low k dielectric stack and CMP compatibility

K. Schulze, Stefan E. Schulz, S. Frühauf et al. · Microelectronic Engineering · 2004 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +13