Concepedia

Publication | Closed Access

Novel low-k polycyanurates for integrated circuit (IC) metallization

DOI

10

Citations

3

References

2005

Year

K. Schulze, Ute Schuldt, O. Kahle, Stefan E. Schulz, M. Uhlig, C. Uhlig, Christian Dreyer, Michael Bauer
Microelectronic Engineering

References

YearCitations

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