Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Esteban Broitman, Niklas Hellgren, O. Wänstrand, Mats Johansson, Torun Berlind, H. Sjöström, J.‐E. Sundgren, M. Larsson, L. Hultman

Wear · 2001 · 97 citations · 29 references

Concepts

References

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