Journal of Applied Physics · 2000 · 49 citations · 25 references
Natural SciencesChemistryMaterials SciencePolymer ChemistryPolymer EngineeringPolymer MaterialsPolymer CharacterizationPolymer DegradationPolymer PhysicsPolymer ProcessingPolymer StructureAblation ThresholdsBackbone Cleavage MechanismsCleavageDefect CentersLaser AblationMolecular Weight ReductionPolymer Degradation MechanismsPolymethyl Methacrylate
A study of the decomposition of poly-(methyl methacrylate) (PMMA) by pulsed UV laser ablation in the incubation regime is presented here. We propose that incubation proceeds via the photoinduced formation of defects centers; while ablation following incubation, at subthreshold fluences, is a thermally driven phenomena. The light scattering data, in the incubation regime, is consistent with molecular weight reduction via backbone cleavage. The defect centers, C=C at chain ends following backbone cleavage, increase the UV absorption coefficient thereby lowering the ablation threshold. Similarities between the mass spectra of ablative PMMA following incubation and pyrolysis suggest that ablation following incubation is thermally driven. The implications of these results in an extensive and contradictory body of available data are discussed.
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Excimer laser etching of polyimide
James H. Brannon, J. R. Lankard, A. I. Baise et al. · Journal of Applied Physics · 1985 · 386 citations
Natural Sciences, Materials Engineering, Materials Science +17
Direct etching of polymeric materials using a XeCl laser
James E. Andrew, P. E. Dyer, Daniel J. Förster et al. · Applied Physics Letters · 1983 · 382 citations
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Femtosecond uv excimer laser ablation
S. K�per, M. Stuke · Applied Physics B · 1987 · 317 citations
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