Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2006 · 13 citations · 1 references
Materials EngineeringEngineeringPhysicsApplied PhysicsIon BeamPlasma SputteringPlasma Application
1
Electron Cyclotron Resonance Ion Sources and ECR Plasmas
A. Pochelon · Plasma Physics and Controlled Fusion · 1997 · 237 citations
Engineering, Ecr Plasmas, Physics +8