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Effect of microstructural coarsening on Hertzian contact damage in silicon nitride

Materials ScienceEngineeringSevere Plastic DeformationMicrofabricationApplied PhysicsMicrostructure-strength RelationshipSemiconductor Device FabricationHertzian Contact DamageSilicon On InsulatorMechanics Of MaterialsMicrostructureHigh Strain RateSilicon Nitride