Publication | Closed Access
Processing of Concentrated Aqueous Silicon Nitride Slips by Slip Casting
69
Citations
10
References
1998
Year
Materials ScienceConcentrated Si 3Chemical EngineeringSinteringSi 3EngineeringSurface ScienceApplied PhysicsCeramics MaterialsAid PowderPowder CompactionPowder SynthesisSemiconductor Device FabricationCeramic PowdersMineral ProcessingSilicon On InsulatorMicrostructureSlip Casting
The optimization of concentrated Si 3 N 4 powder aqueous slurry properties to achieve high packing density slipcast compacts and subsequent high sintered densities was investigated. The influence of pH, sintering aid powder (6% Y 2 O 3 , 4% Al 2 O 3 ), NH 4 PA dispersant, and Si 3 N 4 oxidative thermal treatment was determined for 32 vol% Si 3 N 4 slurries. The results were then utilized to optimize the dispersion properties of 43 vol% solids Si 3 N 4 ‐sintering aid slurries. Calcination of the Si 3 N 4 powder was observed to result in significantly greater adsorption of NH 4 PA dispersant and effectively reduced the viscosity of the 32 vol% slurries. Lower viscosities of the optimized dispersion 43 vol% Si 3 N 4 ‐sintering aid slurries resulted in higher slipcast packing density compacts with smaller pore sizes and pore volumes, and corresponding higher sintered densities.
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