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X-ray reflectivity and surface energy analyses of the physical and electrical properties of α-IGZO/GZO double active layer thin film transistors

Materials ScienceSemiconductor TechnologyElectrical EngineeringElectronic DevicesEngineeringElectronic MaterialsSurface ScienceApplied PhysicsX-ray ReflectivitySemiconductor MaterialSurface Energy AnalysesThin Film Process TechnologyThin FilmsElectrical PropertiesThin Film ProcessingSemiconductor Device