Experimental Investigation of Chromatic Aberration in the Electron Microscope

Abstract

Experimental results on the reduction of chromatic aberration in the magnetic electron microscope are described. It is proved that the chromatic field aberration can be completely compensated by a proper combination of two lenses with adequately designed pole pieces and the voltage stabilization tolerance is greatly improved. Micrographs with a resolution of about 5 mμ can be obtained even under a voltage fluctuation as large as ΔE/E=1.10−2.