Concepedia

High rate deposition of μc-Si with plasma gun CVD

Nobuhiko Imajyo

Journal of Non-Crystalline Solids · 1996 · 13 citations · 1 references

DOI

Concepts

References

1

Improvement of grain size and deposition rate of microcrystalline silicon by use of very high frequency glow discharge

F. Finger, P. Hapke, M. Luysberg et al. · Applied Physics Letters · 1994 · 150 citations

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