Concepedia

Effect of nitrogen content on mechanical properties and tribological behaviors of hydrogenated amorphous carbon films prepared by ion beam assisted chemical vapor deposition

Jen Fin Lin, Zer Chuan Wan, Pal Jen Wei, Hsiao Yeh Chu, Chi Fong Ai

Thin Solid Films · 2004 · 21 citations · 47 references

Concepts

Natural SciencesMaterials EngineeringMaterials ScienceMechanical Behavior Of MaterialsThin FilmsTribologyAmorphous MaterialsAmorphous SolidsChemical Vapor DepositionThin Film Mechanical PropertiesThin-film DepositionTribological MaterialsAmorphous CarbonAmorphous Thin FilmsCarbon MaterialsChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsNitrogen-doped Carbon

References

47