Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering - Concepedia

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Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering

60

Citations

23

References

2007

Year

D.H. Trinh, Mikael Ottosson, M. Collin, I. Reineck, Lars Hultman, Hans Högberg

Thin Solid Films

Materials ScienceEngineeringNanotechnologyOxide ElectronicsApplied PhysicsThin Film Process TechnologyThin FilmsThin Film Processing

References

	Year	Citations

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